讲座题目: Laser Precision Engineering: from Microprocessing to Nanofabrication
主讲人: Prof. Minghui Hong (洪明辉)
讲座时间: 2016.7.20上午 10:00
讲座地点: 中北校区理科大楼A814室
报告人简介:
Hong Minghui is the Director of Optical Science and Engineering Centre and a Full Professor in the Department of Electrical and Computer Engineering, National University of Singapore. He specializes in laser microprocessing & nanofabrication, optical engineering and applications. He received his B.Sc. and M.Sc. degrees on Semiconductor Devices & Physics from Xiamen University, China in 1985 and 1988, respectively. After joining Xiamen University as a Teaching Assistant and Lecturer for 6 years, he continued his postgraduate study at National University of Singapore and received his M.Eng and PhD degrees on Laser Applications in 1996 and 2000, respectively. He worked as Research Engineer, Senior Research Engineer, Principal Research Engineer, Scientist and Senior Scientist at the Data Storage Institute, Singapore from 1995 to 2010. He joined the Department of Electrical & Computer Engineering, National University of Singapore as an Assistant Professor in 2003. He was promoted to Associate Professor in 2007, Associate Professor with tenure in 2010 and Full Professor in July 2014. He has co-authored 10 book chapters, 24 patents granted, and 400+ scientific papers in Nature, Chemical Reviews, Nature Nanotechnology, Advanced Materials, Light: Science and Applications,Nano Letters, Nature Communications and ACS Nano etc. and 60+ plenary/keynote/invited talks in international conferences. He is a member of organizing committees for Laser Precision Micromachining International Conference (2001~2017), International Symposium of Functional Materials (2005, 2007 and 2014), Chair of International Workshop of Plasmonics and Applications in Nanotechnologies (2006), Chair of Conference on Laser Ablation (2009) and Chair of Asia-Pacific Near-field Optics Conference (2013). He is invited to serve as an Editorial Board Member of Scientific Reports, Associate Editor of Science China, and Editor of Laser Micro/nanoengineering. Prof. Hong is Fellow of Optical Society of America (OSA), Fellow of International Society for Optics and Photonics (SPIE), Founding Fellow of International Academy of Photonics and Laser Engineering (IAPLE). He won IES Prestigious Engineering Achievement Award on Laser Microprocessing and Nanofabrication in 2004 as well as Optical Nanoscope in 2016.
报告摘要:
Laser precision engineering has unique advantages as a non-contact process with flexible setup and high speed processing in air, vacuum or liquid environment. In this talk, our research progress on dynamic laser-materials interaction and the signal diagnostics in real time will be reviewed. How to achieve small heat affected zone (HAZ) is a key issue in high quality laser micro-processing and nanomanufacturing. Hybrid laser processing can lead to laser precision engineering of difficultly processed substrates, such as heat sensitive and ultra-thin substrate devices. Optimization of laser-materials interaction can provide us with novel approaches to overcome optical diffraction limit for sub-wavelength surface patterning. Combined with advanced AFM and NSOM means, laser processing resolution can be pushed down to sub-50 nm. To solve the technical bottleneck of slow laser nanoprocessing, parallel (multi-beam) and maskless laser processing techniques are developed. Potential and challenges of laser-materials interaction to cater for 22nm and beyond based on laser produced plasma EUV light source and laser manipulation of atom deposition for atomic engineering will also be discussed.